WaferMax T机械轴承精密直驱转台 | WaferMax T Mechanical-Bearing Direct-Drive Rotary Stage
Aerotech的 WaferMax T 转台是需要低高度封装结构提供高性能应用的理想选择。最初设计用于满足精密晶片检测的需求，WaferMax T已经被应用到多种应用。需要有限旋转时，标准25毫米孔径允许真空线容易直通穿过。如果连续旋转是必要的，可选的单或双端口旋转接头可以合并。台面包括一个标准的安装模式，其允许晶片易于卡盘安装。
WaferMax T Specifications
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Model
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WaferMax T
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Travel
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360 degrees, continuous
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|
Tabletop Diameter
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106.7 mm
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Drive System
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Direct-drive brushless servomotor
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Maximum Bus Voltage
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up to 340 VDC
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Maximum Torque (Continuous)
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5.99 N・m
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|
Encoder
|
2048 lines/rev fundamental; 10000 lines/rev fundamental
|
|
Accuracy(1)
|
HALAR
|
±25 μrad (±5 arc sec)
|
|
Bidirectional Repeatability
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±10 μrad (±2 arc sec)
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Tilt Error Motion
|
97 μrad (20 arc sec)
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Axial Error Motion
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5 μm
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Radial Error Motion
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5 μm
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Maximum Speed
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400 rpm (unloaded)
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Maximum Load(2)
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Axial
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40 kg
|
|
Radial
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20 kg
|
|
Inertia
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0.008130 kg・m2
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Mass
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7.0 kg
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Material
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Aluminum
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Finish
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Black Anodize
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Axial and Radial Cantilevered Load Capability (WaferMax T)
Dimensions
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WaferMax T
Ordering Information
Ordering Example
Ordering Options
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Series
|
Encoder
|
Options
|
|
WaferMax T
|
-RE2048AS
-RE10000AS
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-RU1
-RU2
-GRND
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WaferMax T Direct-Drive Rotary Stage
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Option
|
Description
|
|
WaferMax T
|
Direct-drive rotary stage with 25 mm clear aperture
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Encoder
|
Option
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Description
|
|
-RE2048AS
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Rotary encoder 2048 lines/rev; fundamental AS output
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|
-RE10000AS
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Rotary encoder 10000 lines/rev; fundamental AS output
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Options
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Option
|
Description
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-RU1
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Rotary union for feed-through of air/vacuum, single port
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-RU2
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Rotary union for feed-through of air/vacuum, dual port
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|
-GRND
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Adds grounding connection from tabletop
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