WaferMax T机械轴承精密直驱转台 | WaferMax T Mechanical-Bearing Direct-Drive Rotary Stage
Aerotech的 WaferMax T 转台是需要低高度封装结构提供高性能应用的理想选择。最初设计用于满足精密晶片检测的需求，WaferMax T已经被应用到多种应用。需要有限旋转时，标准25毫米孔径允许真空线容易直通穿过。如果连续旋转是必要的，可选的单或双端口旋转接头可以合并。台面包括一个标准的安装模式，其允许晶片易于卡盘安装。
● 薄型封装结构适用于空间有限的应用
● 直接驱动无刷无槽伺服电机
● 直接耦合的高精度旋转编码器
● 25毫米孔径
● 可选配用于真空环境的旋转接头
● 直接驱动无刷无槽伺服电机
● 直接耦合的高精度旋转编码器
● 25毫米孔径
● 可选配用于真空环境的旋转接头
卓越机械设计
Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and rotating friction. A thick-walled, precision-ground shaft further minimizes wobble.
Cable management is a snap with integral motor power and feedback connectors. Because the WaferMax T is a self-contained unit, it can be integrated easily into multi-stage stacks. Either a service loop or an integrated Aerotech cable management system (CMS) can be provided for a highly reliable solution.
无刷直驱
To maximize positioning performance, the WaferMax T utilizes Aerotech’s S-series brushless, slotless motor. This motor has all of the advantages of a brushless direct-drive motor ― no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMax T ideal for applications requiring outstanding contoured motion, smooth scan velocity or precise incremental steps. The low inertia and zero backlash make the WaferMax T the ideal solution for applications requiring frequent directional changes.
精确定位
Performance is assured with a 10,000 lines per revolution encoder that results in 0.065 arc sec resolution. A 2048 line option is also available. The motor and high-performance rotary encoder are directly coupled to a common shaft.
灵活配置
Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.