ANT130-R 单轴直驱纳米定位转台 | ANT130-R Series Single-Axis Rotary Direct-Drive Nanopositioning Stages
ANT130-R和ANT130-R-PLUS直驱转台被设计成Aerotech纳米运动技术产品家族的一部分。我们的转台提供了史无前例的定位稳定性(0.005角秒)和0.01角秒的增量运动性能,并提供两种等级的精度。
ANT130-R Series Specifications
Model |
ANT130- 20-R |
ANT130- 20-R-PLUS |
ANT130- 180-R |
ANT130- 180-R-PLUS |
ANT130- 360-R |
ANT130- 360-R-PLUS |
|
---|---|---|---|---|---|---|---|
Rotation Angle | 20° | 20° | 180° | 180° | ±360° Continuous | ±360° Continuous | |
Accuracy(1) | 10 arc sec | 3 arc sec | 10 arc sec | 3 arc sec | 10 arc sec | 3 arc sec | |
Resolution | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | 0.01 arc sec | |
Bidirectional Repeatability(1) | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | 1.5 arc sec | |
Unidirectional Repeatability | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | 0.5 arc sec | |
Tilt Error Motion | Synchronous | N/A | N/A | N/A | N/A | 10 arc sec | 10 arc sec |
Asynchronous | N/A | N/A | N/A | N/A | 3 arc sec | 3 arc sec | |
Axial Error Motion(1) | Synchronous | N/A | N/A | N/A | N/A | 2 μm | 2 μm |
Asynchronous | N/A | N/A | N/A | N/A | 0.5 μm | 0.5 μm | |
Radial Error Motion(1) | Synchronous | N/A | N/A | N/A | N/A | 3 μm | 3 μm |
Asynchronous | N/A | N/A | N/A | N/A | 1 μm | 1 μm | |
Maximum Speed | 20 rpm | 20 rpm | 20 rpm | 20 rpm | 200 rpm | 200 rpm | |
Maximum Acceleration | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | 400 rad/s2 | |
In-Position Stability(2) | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | 0.005 arc sec | |
Aperture | 11 mm | 11 mm | 11 mm | 11 mm | 11 mm | 11 mm | |
Maximum Torque (Continuous) | 0.2 N-m | 0.2 N-m | 0.2 N-m | 0.2 N-m | 0.2 N-m | 0.2 N-m | |
Load Capacity(3) | Axial | 3.0 kg | 3.0 kg | 3.0 kg | 3.0 kg | 3.0 kg | 3.0 kg |
Radial | 2.0 kg | 2.0 kg | 2.0 kg | 2.0 kg | 2.0 kg | 2.0 kg | |
Moment | 3 N-m | 3 N-m | 3 N-m | 3 N-m | 3 N-m | 3 N-m | |
Rotor Inertia (Unloaded) | 0.001 kg-m2 | 0.001 kg-m2 | 0.001 kg-m2 | 0.001 kg-m2 | 0.0016 kg-m2 | 0.0016 kg-m2 | |
Stage Mass | 1.5 kg | 1.5 kg | 1.5 kg | 1.5 kg | 1.7 kg | 1.7 kg | |
Material | Aluminum Body/Black Hardcoat Finish | ||||||
MTBF (Mean Time Between Failure) | 30,000 Hours |
- Certified with each stage. Requires the use of an Aerotech controller.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
- All error motion specifications are measured at 60 rpm.
- For high speed operation customer payload must be balanced to G1.0 per ISO 1940.
Electrical Specifications
Drive System | Slotless, Brushless, Direct-Drive Rotary Motor |
Feedback | Noncontact Rotary Encoder |
Maximum Bus Voltage | ±40 VDC |
Limit Switches | 5 V, Normally Closed |
Home Switch | Near Center |
Recommended Controller
Multi-Axis | A3200 |
Npaq MXR Npaq MR-MXH Ndrive ML-MXH |
Ensemble |
Epaq MXR Epaq MR-MXH Ensemble ML-MXH |
|
Single Axis | Soloist | Soloist ML-MXH |
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25oC/24 hours. If this is not possible alternate products are available. Please consult Aerotech for more information.
- ANT130-R Step Plot
- ANT130-R Series Specifications Images
Dimensions
- ANT130-R/ANT130-R-PLUS
Ordering Information
ANT130-R Series Rotary Stage
Option | Description |
---|---|
ANT130-R | Aerotech direct-drive rotary positioner |
Rotary Stage Travel
Option | Description |
---|---|
ANT130-20-R | 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops |
ANT130-20-R-PLUS | 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops (high accuracy version) |
ANT130-180-R | 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops |
ANT130-180-R-PLUS | 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops (high accuracy version) |
ANT130-360-R | 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder and optical limits |
ANT130-360-R-PLUS | 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder and optical limits (high accuracy version) |
Options
Option | Description |
---|---|
-MP | Breadboard mounting plate |