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ABRT系列空气轴承精密直驱转台 | ABRT Air-Bearing Direct-Drive Rotary Stage | ABRT精密气浮转台

Aerotech的 ABRT 系列空气轴承精密直驱转台提供卓越的角度定位，速度稳定性和无误差运动性能，并且拥有令人印象深刻的有效负载能力及出色的轴向和径向刚性。该ABRT精密转台是专为满足DVD母盘，晶圆检测，高精度测量应用，X射线衍射系统，光学检测和制造，以及微型机电系统(MEMS)/纳米器件制造的严格要求。

ABRT Specifications

Model ABRT-150 ABRT-200 ABRT-260
Width 146 mm 196 mm 260 mm
Tabletop Diameter 100 mm 145 mm 200 mm
Height 135 mm 165 mm 185 mm
Aperture 20 mm 30 mm 50 mm
Travel 360° Continuous
Motor Direct-Drive Brushless Servomotor
Stall Torque, Continuous 0.36 N-m 3.7 N-m 6.7 N-m
Peak Torque 1.4 N-m 14.6 N-m 26.6 N-m
BEMF, Line-Line, Max 10.9 Vpk/krpm 163.6 Vpk/krpm 129.8 Vpk/krpm
Continuous Current, Stall 3.8 Apk 2.7 Apk 6.2 Apk
2.7 Arms 1.9 Arms 4.4 Arms
Torque Constant 0.09 N-m/Apk 1.35 N-m/Apk 1.07 N-m/Apk
0.13 N-m/Arms 1.91 N-m/Arms 1.52 N-m/Arms
Bus Voltage Up to 320 VDC
Resolution(1) 0.267 μrad (0.055 arc sec) 0.174 μrad (0.036 arc sec) 0.133 μrad (0.027 arc sec)
Fundamental Encoder Resolution 11,840 lines/rev 18,000 lines/rev 23,600 lines/rev
Max Speed(2) 1200 rpm 800 rpm 600 rpm
Accuracy(3) ±2 arc sec
Repeatability <1 arc sec
Max Load(4) Axial 20 kg 41 kg 69 kg
Radial 3 kg 6 kg 10 kg
Tilt 3.5 Nm 8 Nm 18 Nm
Axial Error Motion (Synchronous) <100 nm
Radial Error Motion (Synchronous) <150 nm
Tilt Error Motion (Synchronous) <2.4 μrad (<0.5 arc sec)
Axial Error Motion (Asynchronous) <20 nm
Radial Error Motion (Asynchronous) <20 nm
Tilt Error Motion (Asynchronous) <0.2 μrad (<0.04 arc sec)
Operating Pressure(6) 80 psig (5.5 bar) ±5 psig (0.3 bar)
Air Consumption(7) <56.6 SLPM (<2 SCFM)
Inertia Unloaded 2300 kg・mm2 13,500 kg・mm2 46,400 kg・mm2
Total Mass 6.7 kg 14.7 kg 27.1 kg
Material Aluminum
Finish Hardcoat (62 Rockwell Hardness)
  1. Maximum resolution presumes A3200 controller using MXH500 multiplication, and accounts for controller quadrature.
  2. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
  3. Certified with each stage. Requires the use of an Aerotech controller.
  4. Maximum loads are mutually exclusive.
  5. All error motion specifications measured at 60 rpm.
  6. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller is recommended.
  7. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better. Recommend nitrogen at 99.9% purity.

Dimensions

  • ABRT-150
  • ABRT-200
  • ABRT-260

Ordering Information

Ordering Example

ABRT -200 -AS

Ordering Options

Series Width (mm) Position Transducer
ABRT -150
-200
-260 		-AS
-X50

ABRT Series Direct-Drive, Air-Bearing Rotary Stage

Option Description
ABRT-150 150 mm wide air-bearing rotary stage with 0.36 N-m continuous torque output
ABRT-200 200 mm wide air-bearing rotary stage with 3.7 N-m continuous torque output
ABRT-260 260 mm wide air-bearing rotary stage with 6.7 N-m continuous torque output

Position Transducer

Option Description
-AS Standard feedback device, sine wave output; 11,840 cycles per rev on ABRT-150; 18,000 cycles per rev on ABRT-200; and 23,600 cycles per rev on ABRT-260
-X50 Square-wave digital output; 592,000 cycles per rev on ABRT-150; 900,000 cycles per rev on ABRT-200; and 1,180,000 cycles per rev on ABRT-260
    Note: Digital output encoder signals are synthesized with a 40 MHz clock. Care must be taken to ensure that the encoder sample rate on the controller is 40 MHz or higher. Slower clock rates are available upon request.