ARA1000空气轴承精密直驱转台 | ARA1000 Air-Bearing Direct-Drive Rotary Stage | ARA1000精密气浮转台
Aerotech 的 ARA1000 旋转执行器代表了显著的突破性应用,如平板显示器处理加工所要求的大型有效载荷的联接方式。高负载惯量多轴系统可能遭受机械不稳定,限制整机生产效率。ARA1000 通过特殊设计,显著提高了平台刚性,消除了这个问题。ARA1000转台采用了标准的57.2毫米通孔,它可以很容易地穿过真空线路。台面包括一个标准的安装模式,其允许非常容易地进行卡盘安装。
ARA1000 Series Specifications
Model
|
ARA1000
|
Travel
|
100°
|
Bus Voltage
|
Up to 160 VDC
|
Motor
|
S-180-44-A
|
Continuous Current
|
Apk
|
2.7 A
|
Arms
|
1.9 A
|
Accuracy(1)
|
±9.7 μrad (±2 arc sec)
|
Bidirectional Repeatability
|
±4.85 μrad (±1 arc sec)
|
Resolution(2)
|
0.058 μrad (0.012 arc sec)
|
Maximum Load (Axial)
|
45 kg
|
Maximum Speed(3)
|
60° per second
|
Rotating Inertia (Unloaded)
|
0.1203 kg-m2
|
Operating Pressure(4)
|
60 psig (4.137 bar) +0 psig (0 bar) -5 psig (-0.344 bar)
|
Vacuum Supply
|
21 "Hg ±2 "Hg
|
Air Consumption(5)
|
<56.6 SLPM (<2 SCFM)
|
Mass
|
17 kg
|
Finish
|
Tabletop
|
Hardcoat
|
Stage
|
Black Anodize
|
Dimensions
-
ARA1000
Ordering Information
Ordering Example
Ordering Options
Series
|
Limits
|
Encoder
|
ARA1000
|
-NC
-NO
|
-REAS
|
ARA1000 Rotary Actuator
Option
|
Description
|
ARA1000
|
Direct-drive rotary stage
|
Limits
Option
|
Description
|
-NC
|
Normally-closed end of travel limit switches (standard)
|
-NO
|
Normally-open end of travel limit switches
|
Encoder
Option
|
Description
|
-REAS
|
Rotary encoder 150 lines/degree; fundamental AS output
|