ALS130H 机械轴承直驱平台 | ALS130H Mechanical-Bearing Direct-Drive Linear Stage | 机械轴承直线电机直驱直线定位平台
ALS130H直线电机平台,其亚纳米级的分辨率,优越的双向重复性和出色的低速性能,它是高性能的测试、测量、检验和其他要求苛刻应用的无与伦比的解决方案。
ALS130H Specifications
Model | ALS130H-025 | ALS130H-050 | ALS130H-100 | ALS130H-150 | |
---|---|---|---|---|---|
Travel | 25 mm | 50 mm | 100 mm | 150 mm | |
Drive System | Linear Brushless Servomotor (BLMUC-95-A) | ||||
Bus Voltage | Up to 80 VDC | ||||
Continuous Current | Apk | 2.94 | |||
Arms | 2.08 | ||||
Feedback | Noncontact Linear Encoder | ||||
Resolution | 0.5 nm - 1.0 μm | ||||
Maximum Travel Speed(1) | 300 mm/s | ||||
Maximum Linear Acceleration | 1 g (No Load) | ||||
Maximum Load(2) | Horizontal | 12.0 kg | |||
Side | 10.0 kg | ||||
Accuracy | HALAR(3) | ±0.3 μm | |||
Standard | ±1.0 μm | ±1.0 μm | ±2.0 μm | ±3.0 μm | |
Repeatability | Mean | 75 nm | |||
Peak to Peak | ±100 nm | ||||
Straightness and Flatness | Maximum Deviation | ±1.0 μm | ±1.0 μm | ±1.5 μm | ±2.0 μm |
Pitch | 5 arc sec | 6 arc sec | 8 arc sec | 10 arc sec | |
Roll | 5 arc sec | 6 arc sec | 8 arc sec | 10 arc sec | |
Yaw | 3 arc sec | 3 arc sec | 4 arc sec | 5 arc sec | |
Nominal Stage Weight | 3.0 kg | 3.0 kg | 3.8 kg | 4.6 kg | |
Moving Mass | 0.9 kg | 1.1 kg | 1.3 kg | 1.6 kg | |
Construction | Aluminum Body/Black Anodize Finish |
- Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
- Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
- Available with Aerotech controllers.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- ALS130Hspec1
- ALS130Hspec2
- ALS130Hspec3
Dimensions
- ALS130H
Ordering Information
Ordering Example
ALS130H | -100 | - | -NC |
Ordering Options
Series | Travel (mm) | Options | Limits |
---|---|---|---|
ALS130H |
-025 -050 -100 -150 |
-XYCMS |
-NC -NO |
ALS130H Series Linear Motor Stage
Option | Description |
---|---|
ALS130H-025 | 25 mm (1 in) travel stage with linear motor, high-accuracy linear encoder with amplified sine output 1 Vpp (4 μm signal period), limits and single 25-pin connector (-25DU) |
ALS130H-050 | 50 mm (2 in) travel stage with linear motor, high-accuracy linear encoder with amplified sine output 1 Vpp (4 μm signal period), limits and single 25-pin connector (-25DU) |
ALS130H-100 | 100 mm (4 in) travel stage with linear motor, high-accuracy linear encoder with amplified sine output 1 Vpp (4 μm signal period), limits and single 25-pin connector (-25DU) |
ALS130H-150 | 150 mm (6 in) travel stage with linear motor, high-accuracy linear encoder with amplified sine output 1 Vpp (4 μm signal period), limits and single 25-pin connector (-25DU) |
Note: The amplified sine output linear encoder requires external multiplier. External signal multipliers available with A3200 amplifier products.
Note: -25DU single 25-pin connector not valid for systems using bus voltages greater than 80 V.
Options
Option | Description |
---|---|
-XY-CMS | Cable management system |
Note: Not available with 25 mm travel stages. Order with lower axis stage.
Limits
Option | Description |
---|---|
-NC | Normally-closed end of travel limit switches (standard) |
-NO | Normally-open end of travel limit switches |
Accessories (to be ordered as separate line item)
Option | Description |
---|---|
HALAR | High-accuracy system - linear error correction for accuracy and repeatability |
ALIGNMENT-NPA | Non-precision XY assembly |
ALIGNMENT-PA10 | XY assembly; 10 arc sec orthogonal |
ALIGNMENT-PA5 | XY assembly; 5 arc sec orthogonal |