ANT180-L 机械轴承直驱平台 | ANT180-L Mechanical-Bearing Direct-Drive Linear Stage | 交叉滚柱轴承直线电机直驱精密定位平台
ANT180-L继续扩展了Aerotech高精度交叉滚柱轴承平台的产品线。具有纳米级分辨率、优越的双向重复精度和出众的低速性能，它是高精度校准、测量、扫描和其他要求苛刻的应用的终极解决方案。
Mechanical Specifications
| Model | ANT180-160-L | ANT180-210-L | ANT180-260-L | ANT180-360-L | ||
|---|---|---|---|---|---|---|
| Travel | 160 mm | 210 mm | 260 mm | 360 mm | ||
| Accuracy(1) | LNAS | PLUS | ±150 nm | ±150 nm | ±200 nm | ±200 nm |
| Standard | ±2.0 μm | ±2.5 μm | ±3.0 μm | ±3.5 μm | ||
| LTAS | PLUS | ±300 nm | ±300 nm | ±350 nm | ±350 nm | |
| Standard | ±4.0 μm | ±5.0 μm | ±6.0 μm | ±7.0 μm | ||
| Resolution | LNAS | 1 nm | 1 nm | 1 nm | 1 nm | |
| LTAS | 3 nm | 3 nm | 3 nm | 3 nm | ||
|
Repeatability (BiDirectional) (1) |
LNAS | ±100 nm | ±100 nm | ±125 nm | ±125 nm | |
| LTAS | ±150 nm | ±150 nm | ±175 nm | ±175 nm | ||
| Straightness(1) | ±1.0 μm | ±1.25 μm | ±1.5 μm | ±1.75 μm | ||
| Flatness(1) | ±1.0 μm | ±1.25 μm | ±1.5 μm | ±1.75 μm | ||
| Pitch | 14 arc sec | 14 arc sec | 16 arc sec | 16 arc sec | ||
| Roll | 14 arc sec | 14 arc sec | 16 arc sec | 16 arc sec | ||
| Yaw | 10 arc sec | 10 arc sec | 12 arc sec | 12 arc sec | ||
| Maximum Speed | 500 mm/s | 500 mm/s | 500 mm/s | 500 mm/s | ||
| Maximum Acceleration | 2 g (No Load) | 2 g (No Load) | 2 g (No Load) | 2 g (No Load) | ||
| Speed Stability | See graph for typical performance | |||||
| Settling Time | See graph for typical performance | |||||
| Maximum Force (Continuous) | 110.5 N | 110.5 N | 110.5 N | 110.5 N | ||
| Load Capacity(2) | Horizontal | 30 kg | 30 kg | 30 kg | 30 kg | |
| Side | 20 kg | 20 kg | 20 kg | 20 kg | ||
| Moving Mass | 6.6 kg | 7.8 kg | 9.2 kg | 11.7 kg | ||
| Stage Mass | 12.8 kg | 14.9 kg | 17.6 kg | 22.4 kg | ||
| Material | Aluminum Body/Black Hardcoat Finish | |||||
| MTBF (Mean Time Between Failure) | 30,000 Hours | |||||
- Certified with each stage.
- Axis orientation for on-axis loading is listed.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- -PLUS requires the use of an Aerotech controller.
- Specifications are LNAS and LTAS only. Consult factory for specifications regarding the LTX50 option.
Electrical Specifications
| Drive System | Brushless Linear Servomotor |
| Feedback | Noncontact Linear Encoder (see signal period options on Order Information page) |
| Maximum Bus Voltage | ±80 VDC |
| Limit Switches | 5 V, Normally Open |
| Home Switch | Near Center |
Recommended Controller
| Multi-Axis | A3200 |
Npaq MXR Npaq MR-MXH Ndrive ML-MXH |
| Ensemble |
Epaq MXH Epaq MR-MXH Ensemble ML-MXH |
|
| Single Axis | Soloist | Soloist ML-MXH |
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.
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ANT180-L
Dimensions
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ANT180-L
Ordering Information
ANT180-L Series Linear Motor Stage
| Option | Description |
|---|---|
| ANT180-160-L | 160 mm travel stage with linear motor and limits |
| ANT180-210-L | 210 mm travel stage with linear motor and limits |
| ANT180-260-L | 260 mm travel stage with linear motor and limits |
| ANT180-360-L | 360 mm travel stage with linear motor and limits |
Standard Linear Encoders
| Option | Description |
|---|---|
| -LTAS | Amplified sine output 1 Vpp (20 μm signal period) requires signal multiplier |
| -LTX50 | 0.1 micron line driver output |
High-Accuracy Linear Encoders
| Option | Description |
|---|---|
| -LNAS | High-accuracy amplified sine output 1 Vpp (4 μm signal period) requires signal multiplier |
CMS - Cable Management
| Option | Description |
|---|---|
| -XY | Cable management system for X-Y assembly (only order with X axis) |
| -XY-AIR | Cable management system for X-Y assembly with 6 mm air line (only order with X axis) |
| -XYZ | Cable management system for X-Y-Z assembly (only order with X axis) |
| -XYZ-AIR | Cable management system for X-Y-Z assembly with 6 mm air line (only order with X axis) |
| -Y | Cable management system for X-Y assembly (only order with Y axis) |
| -Y-AIR | Cable management system for X-Y assembly with 6 mm air line (only order with Y axis) |
| -YZ | Cable management system for Y-Z assembly (only order with Y axis) |
| -YZ-AIR | Cable management system for Y-Z assembly with 6 mm air line (only order with Y axis) |
Accessories (to be ordered as separate line item)
| Option | Description |
|---|---|
| PLUS | High-accuracy version |
| ALIGNMENT-PA10 | XY assembly; 10 arc sec orthogonal |
| ALIGNMENT-PA5 | XY assembly; 5 arc sec orthogonal |