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ANT130-L 直驱纳米定位平台 | ANT130-L Series Single-Axis Linear Direct-Drive Nanopositioning Stages | 交叉滚柱轴承直线电机直驱纳米定位平台
ANT130-L系列平台在行程达160毫米的范围内仍可提供纳米级性能。凭借其低矮外形和出色的性能特点，ANT130-L是高精度校准、检测、定位和测量站的终极解决方案。

Mechanical Specifications

Model ANT130-035-L ANT130-035-L-PLUS ANT130-060-L ANT130-060-L-PLUS
Travel 35 mm 35 mm 60 mm 60 mm
Accuracy(1) ±2 μm ±250 nm ±2 μm ±250 nm
Resolution 1 nm 1 nm 1 nm 1 nm
Repeatability (Bidirectional)(1) ±100 nm ±75 nm ±100 nm ±75 nm
Repeatability (Unidirectional) ±25 nm ±25 nm ±25 nm ±25 nm
Straightness(1) ±1.0 μm ±1.0 μm ±1.0 μm ±1.0 μm
Flatness(1) ±1.0 μm ±1.0 μm ±1.0 μm ±1.0 μm
Pitch 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec 5 arc sec 5 arc sec
Maximum Speed 350 mm/s 350 mm/s 350 mm/s 350 mm/s
Maximum Acceleration 1 g (No Load) 1 g (No Load) 1 g (No Load) 1 g (No Load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(2) <1 nm <1 nm <1 nm <1 nm
Maximum Force (Continuous) 23 N 23 N 23 N 23 N
Load Capacity(3) Horizontal 12.0 kg 12.0 kg 12.0 kg 12.0 kg
Side 10 kg 10 kg 10 kg 10 kg
Moving Mass 1.2 kg 1.2 kg 1.4 kg 1.4 kg
Stage Mass 2.1 kg 2.1 kg 2.5 kg 2.5 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • -PLUS requires the use of an Aerotech controller.
Model ANT130-110-L ANT130-110-L-PLUS ANT130-160-L ANT130-160-L-PLUS
Travel 110 mm 110 mm 160 mm 160 mm
Accuracy(1) ±3 μm ±300 nm ±4 μm ±300 nm
Resolution 1 nm 1 nm 1 nm 1 nm
Repeatability (Bidirectional)(1) ±100 nm ±75 nm ±100 nm ±75 nm
Repeatability (Unidirectional) ±25 nm ±25 nm ±25 nm ±25 nm
Straightness(1) ±1.0 μm ±1.0 μm ±1.5 μm ±1.5 μm
Flatness(1) ±1.0 μm ±1.0 μm ±1.5 μm ±1.5 μm
Pitch 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec 5 arc sec 5 arc sec
Maximum Speed 350 mm/s 350 mm/s 350 mm/s 350 mm/s
Maximum Acceleration 1 g (No Load) 1 g (No Load) 1 g (No Load) 1 g (No Load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(2) <1 nm <1 nm <1 nm <1 nm
Maximum Force (Continuous) 23 N 23 N 23 N 23 N
Load Capacity(3) Horizontal 12.0 kg 12.0 kg 12.0 kg 12.0 kg
Side 10 kg 10 kg 10 kg 10 kg
Moving Mass 1.9 kg 1.9 kg 2.3 kg 2.3 kg
Stage Mass 3.3 kg 3.3 kg 3.9 kg 3.9 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • -PLUS requires the use of an Aerotech controller.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

  • ANT130-L Step Plot
  • ANT130-L Performance Graphs

Dimensions

  • ANT130-L/ANT130-L-PLUS
  • Mounting Plate: ANT130-L/ANT130-L-PLUS

Ordering Information

ANT130-L Series Linear Stage

Option Description
ANT130-L/ANT130-L-PLUS Aerotech nanotranslation crossed-roller linear positioner

Linear Stage Travel

Option Description
ANT130-035-L 35 mm travel stage with linear motor and limits
ANT130-035-L-PLUS 35 mm travel stage with linear motor and limits (high accuracy version)
ANT130-060-L 60 mm travel stage with linear motor and limits
ANT130-060-L-PLUS 60 mm travel stage with linear motor and limits (high accuracy version)
ANT130-110-L 110 mm travel stage with linear motor and limits
ANT130-110-L-PLUS 110 mm travel stage with linear motor and limits (high accuracy version)
ANT130-160-L 160 mm travel stage with linear motor and limits
ANT130-160-L-PLUS 160 mm travel stage with linear motor and limits (high accuracy version)

Output Cable Connectors

Option Description
-25DU Single 25-pin D connector (standard)
-4DU-25DU 4-pin HPD and 25-pin D connectors

Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V

Options

Option Description
-MP Breadboard mounting plate