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Aerotech的ANT95-L系列平台是世界上第一个行程超过25毫米的纳米级定位系统。ANT95-L和ANT95-L-PLUS是当今最好的提供一流的速度、精度、分辨率、重复精度、可靠性和尺寸的交叉滚柱轴承定位平台之一，并且提供两种精度等级。这些线性平台可以展现高达5g的加速度，500mm/s的速度，增强的负载能力，并且具有标准化，通用基座安装模式，允许其在大范围的配置中一起使用。

Mechanical Specifications

Model		ANT95-25-L	ANT95-25-L-PLUS	ANT95-50-L	ANT95-50-L-PLUS
Travel		25 mm	25 mm	50 mm	50 mm
Accuracy(1)		±2.5 μm	±250 nm	±2.5 μm	±250 nm
Resolution		1 nm	1 nm	1 nm	1 nm
Repeatability (Bidirectional)(1)		±100 nm	±75 nm	±100 nm	±75 nm
Repeatability (Unidirectional)		±25 nm	±25 nm	±25 nm	±25 nm
Straightness(1)		±1.0 μm	±1.0 μm	±1.0 μm	±1.0 μm
Flatness(1)		±1.0 μm	±1.0 μm	±1.0 μm	±1.0 μm
Pitch		10 arc sec	10 arc sec	10 arc sec	10 arc sec
Roll		10 arc sec	10 arc sec	10 arc sec	10 arc sec
Yaw		5 arc sec	5 arc sec	5 arc sec	5 arc sec
Maximum Speed		500 mm/s	500 mm/s	500 mm/s	500 mm/s
Maximum Acceleration		5 g (No Load)	5 g (No Load)	4 g (No Load)	4 g (No Load)
Speed Stability		See graph for typical performance
Settling Time		See graph for typical performance
In-Position Stability(2)		<1 nm	<1 nm	<1 nm	<1 nm
Maximum Force (Continuous)		7.75 N	7.75 N	9.5 N	9.5 N
Load Capacity(3)	Horizontal	5.0 kg	5.0 kg	7.0 kg	7.0 kg
	Side	5.0 kg	5.0 kg	5.0 kg	5.0 kg
Moving Mass		0.46 kg	0.46 kg	0.52 kg	0.52 kg
Stage Mass		0.8 kg	0.8 kg	1.2 kg	1.2 kg
Material		Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)		30,000 Hours

1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.

• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

Model		ANT95-75-L	ANT95-75-L-PLUS	ANT95-100-L	ANT95-100-L-PLUS
Travel		75 mm	75 mm	100 mm	100 mm
Accuracy(1)		±4.0 μm	±275 nm	±5.0 μm	±275 nm
Resolution		1 nm	1 nm	1 nm	1 nm
Repeatability (Bidirectional)(1)		±100 nm	±75 nm	±100 nm	±75 nm
Repeatability (Unidirectional)		±25 nm	±25 nm	±25 nm	±25 nm
Straightness(1)		±2.0 μm	±2.0 μm	±2.5 μm	±2.5 μm
Flatness(1)		±2.0 μm	±2.0 μm	±2.5 μm	±2.5 μm
Pitch		10 arc sec	10 arc sec	10 arc sec	10 arc sec
Roll		10 arc sec	10 arc sec	10 arc sec	10 arc sec
Yaw		5 arc sec	5 arc sec	5 arc sec	5 arc sec
Maximum Speed		500 mm/s	500 mm/s	500 mm/s	500 mm/s
Maximum Acceleration		3 g (No Load)	3 g (No Load)	3 g (No Load)	3 g (No Load)
Speed Stability		See graph for typical performance
Settling Time		See graph for typical performance
In-Position Stability(2)		<1 nm	<1 nm	<1 nm	<1 nm
Maximum Force (Continuous)		9.5 N	9.5 N	12.9 N	12.9 N
Load Capacity(3)	Horizontal	7.0 kg	7.0 kg	7.0 kg	7.0 kg
	Side	5.0 kg	5.0 kg	5.0 kg	5.0 kg
Moving Mass		0.72 kg	0.72 kg	0.91 kg	0.91 kg
Stage Mass		1.64 kg	1.64 kg	2.1 kg	2.1 kg
Material		Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)		30,000 Hours

1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.

• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

Electrical Specifications

Drive System	Brushless Linear Servomotor
Feedback	Noncontact Linear Encoder
Maximum Bus Voltage	±40 VDC
Limit Switches	5 V, Normally Closed
Home Switch	Near Center

Recommended Controller

Multi-Axis	A3200	Npaq MXR Npaq MR-MXH Ndrive ML-MXH
	Ensemble	Epaq MXH Epaq MR-MXH Ensemble ML-MXH
Single Axis	Soloist	Soloist ML-MXH

1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

• Step Plot
• Performance Graphs

Dimensions

• ANT95-25-L/ANT95-25-L-PLUS
• ANT95-50-L/ANT95-50-L-PLUS
• ANT95-75-L/ANT95-75-L-PLUS
• ANT95-100-L/ANT95-100-L-PLUS
• Mounting Plates: ANT95-25-L/ANT95-25-L-PLUS
• Mounting Plates: ANT95-50-L/ANT95-50-L-PLUS
• Mounting Plates: ANT95-75-L/ANT95-75-L-PLUS
• Mounting Plates: ANT95-100-L/ANT95-100-L-PLUS

Ordering Information

ANT95-L Series Linear Stage

Option	Description
ANT95-L/ANT95-L-PLUS	Aerotech nanotranslation crossed-roller linear positioner

Linear Stage Travel

Option	Description
ANT95-25-L	25 mm (1 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-25-L-PLUS	25 mm (1 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
ANT95-50-L	50 mm (2 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-50-L-PLUS	50 mm (2 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
ANT95-75-L	75 mm (3 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-75-L-PLUS	75 mm (3 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
ANT95-100-L	100 mm (4 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-100-L-PLUS	100 mm (4 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)

Options

Option	Description
-MP	Breadboard mounting plate
-AP	XY adapter plate (6 mm thick; ANT95-50-L and ANT95-50-L-PLUS only)