ABL9000 空气轴承直驱XY平台 | ABL9000 Air-Bearing Direct-Drive XY Linear Stage | 气浮直线电机直驱平台
The ABL/ABLH9000 is simply the world’s highest performance air bearing. Designed to meet the exacting requirements of wafer, flat panel display and optical inspection and fabrication, the ABL/ABLH9000 sets new standards of performance.