PlanarDL 双轴平台 | PlanarDL Two Axis, Mechanical Bearing, Linear-Motor Stage | 双轴机械轴承直线电机平台
Aerotech’s PlanarDL-series stages offer excellent geometric and dynamic performance in a compact, low-profile package. A variety of travel and performance options make this stage ideal for applications ranging from surface profilometry to LED wafer scribing.