The ATS0300 provides an economical solution for applications requiring fine positioning in a confined area. ATS0300 series stages feature bases made from a special aluminum alloy tooling plate for good stiffness and long-term stability. Other high quality features are crossed-roller linear bearings for smooth travel and excellent payload characteristics, a precision-ground lead screw for high accuracy and hardcoat treated base and table for high resistance to marring and scratching. Table mounting holes have Helicoil stainless steel inserts to permit multiple screw insertions without thread wear.
The ATS0300 precision-ground lead screw is available in both metric and English leads. A fine pitch screw results in submicron resolution.
ATS0300 Specifications
| Model | ATS03005 | |
|---|---|---|
| Travel | 50 mm | |
| Drive System | Precision Ground Lead Screw/Brushless Servomotor (BMS60-A-D25-E1000H) | |
| Bus Voltage | Up to 160 VDC | |
| Continuous Current | Apk | Up to 2.3 A |
| Arms | Up to 1.6 A | |
| Feedback | Noncontact Rotary Encoder (1000 line) | |
| Resolution | 0.5 mm/rev Lead | 0.1 μm @ 4000 steps/rev Motor Resolution |
| 0.025 in/rev Lead | 5 μin @ 4000 steps/rev Motor Resolution | |
| Maximum Travel Speed | 4 mm/s | |
| Maximum Load(1) | Horizontal | 25.0 kg |
| Vertical | 9.0 kg | |
| Side | 9.0 kg | |
| Accuracy | 2.5 μm /25 mm | |
| Repeatability | Unidirectional | 0.3 μm |
| Bidirectional | 1.0 μm | |
| Straightness and Flatness | 2.5 μm/25 mm | |
| Nominal Stage Weight | Less Motor | 1.4 kg |
| With Motor | 2.5 kg | |
| Construction | Aluminum Body/Hardcoat | |
- Payload specifications are for single-axis system and based on lead screw and bearing life of 250 km (10 million inches) of travel.
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Cantilevered load capability of the ATS0300
Dimensions
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ATS0300
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HDZ3 Bracket
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HDT3 Bracket
Ordering Information
Ordering Example
| ATS03 | -005 | - | -M | -5 | -BMS | -NC |
Ordering Options
| Series | Travel (mm) | Stage Construction Options | Mounting and Grid Pattern | Drive Screw | Motor | Limits |
|---|---|---|---|---|---|---|
| ATS03 | -005 |
/VAC3 /VAC6 |
-M -U -MA -UA |
-0025 -5 |
-BMS -SM -NM |
-NC -NO -9DU -FLY |
ATS0300 Series Linear Ball-Screw Stage
| Option | Description |
|---|---|
| ATS03005 | 50 mm (2 in) travel stage with ground lead screw and limits |
Stage Construction Options
| Option | Description |
|---|---|
| /VAC3 | Vacuum preparation of stage to 10-3torr |
| /VAC6 | Vacuum preparation of stage to 10-6torr |
Mounting and Grid Pattern
| Option | Description |
|---|---|
| -M | Metric dimension mounting pattern and holes |
| -U | English dimension mounting pattern and holes |
| -MA | Metric dimension mounting pattern and holes with aperture tabletop and base |
| -UA | English dimension mounting pattern and holes with aperture tabletop and base |
Drive Screw
| Option | Description |
|---|---|
| -0025 | 0.025 in/rev drive-screw lead |
| -5 | 0.5 mm/rev drive-screw lead |
Motor
| Option | Description |
|---|---|
| -BMS | Brushless servomotor with connectors and 1000-line encoder; requires cable (BMS60-A-D25-E1000H/) |
| -SM | Stepping motor with connector and home marker pulse (one per rev); requires cable (50SMB2-HM/) |
| -NM | No motor or encoder |
Limits
| Option | Description |
|---|---|
| -NC | Normally closed end of travel limit switches (standard) |
| -NO | Normally open end of travel limit switches |
| -9DU | With 9-pin limit connector |
| -FLY | With flying leads |
Accessories (to be ordered as separate line item)
| Option | Description |
|---|---|
| ALIGNMENT-NPA | Non-precision XY assembly |
| ALIGNMENT-NPAZ | Non-precision XZ or YZ assembly |
| ALIGNMENT-PA10 | XY assembly; 10 arc sec orthogonal |
| ALIGNMENT-PA10Z | XZ or YZ assembly with L-bracket; 10 arc second orthogonal |
| ALIGNMENT-PA5 | XY assembly; 5 arc sec orthogonal |
| ALIGNMENT-PA5Z | XZ or YZ assembly with L-bracket; 5 arc second orthogonal |
| HDZ3 | English right angle L-bracket |
| HDZ3M | Metric right angle L-bracket |
| HDZ3A | English right angle L-bracket with aperture |
| HDZ3AM | Metric right angle L-bracket with aperture |
| HDT3 | English low profile right angle L-bracket |
| HDT3M | Metric low profile right angle L-bracket |
| HDT3A | English low profile right angle L-bracket with aperture |
| HDT3AM | Metric low profile right angle L-bracket with aperture |
*Please go HERE for complete information on XY, XZ and YZ assembly options.
*Please go HERE for complete information on motor orientation options.