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The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications.

ATS100 Specifications

Model			ATS100-050	ATS100-100	ATS100-150	ATS100-200
Travel			50 mm	100 mm	150 mm	200 mm
Drive System			Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H)
Bus Voltage			Up to 160 VDC
Continuous Current		Apk	Up to 2.3 A
		Arms	Up to 1.6 A
Feedback			Noncontact Rotary Encoder (1000 line)
Resolution	2 mm/rev lead		0.5 μm @ 4000 steps/rev Motor Resolution
Maximum Travel Speed(1)			100 mm/s
Maximum Load(2)	Horizontal		25.0 kg
	Vertical		10.0 kg
	Side		10.0 kg
Accuracy	HALAR(3)		±0.5 μm	±0.5 μm	±0.75 μm	±1.0 μm
	Standard		±2.0 μm	±3.0μm	±5.0 μm	±6.0 μm
Repeatability (Bidirectional)	HALAR(3)		±0.3 μm
	Standard		±0.7 μm
Straightness and Flatness	Differential	HALSF	1.0 μm/25 mm
		Standard	2.0 μm/25 mm
	Maximum Deviation	HALSF	±0.5 μm	± 1.0 μm	±1.5 μm	±1.75 μm
		Standard	±1.0 μm	±2.0 μm	±2.0 μm	±3.0 μm
Pitch and Yaw			5 arc sec	8 arc sec	10 arc sec	12 arc sec
Nominal Stage Weight	Less Motor		1.6 kg	1.7 kg	1.8 kg	2.0 kg
	With Motor		2.7 kg	2.8 kg	2.9 kg	3.1 kg
Construction			Aluminum Body/Stage and Table; Clear Anodize Finish

1. Excessive duty cycle may impact stage accuracy.
2. Payload specifications are for single axis systems and based on ball screw and bearing life of 2500 km (100 million inches) of travel.
3. Available with Aerotech controllers.
4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

• ATS100 Cantilevered Load Graph

Dimensions

• ATS100
• HDZ1 Bracket
• MP100 Mounting Plate

Ordering Information

Ordering Example

ATS100

-050

-

-20P

-M

-

-BMS

-

-2

-NC-9DU

-C025

Ordering Options

Series	Travel (mm)	Stage Construction Options	Drive Screw	Tabletop	Motor	Foldback Options	Motor Orientation	Limits	Coupling
ATS100	-050 -100 -150 -200	/VAC3 /VAC6 /STEEL	-20P	-M -U	-NM -SM -BMS -BMS-BRK -BMS-AS -BMS-AS-BRK -BM -BM-BRK -BM-AS -BM-AS-BRK	-FB025 -FB025-BRK	-0 -2 -3 -4 -5 -8 -12	-NC-9DU -NC-FLY -NO-9DU -NO-FLY	-C025 -C0375 -NONE

ATS100 Series Linear Ball-Screw Stage-

Option	Description
ATS100	The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for a broad array of industrial applications. ATS100 series stages employ a precision-ground ball screw, which is pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High-quality, pre-loaded duplex bearings are used to eliminate axial play.
ATS100-050	50 mm (2 in) travel stage with limits
ATS100-100	100 mm (4 in) travel stage with limits
ATS100-150	150 mm (6 in) travel stage with limits
ATS100-200	200 mm (8 in) travel stage with limits

Stage Construction (Optional)

Option	Description
/VAC3	Vacuum preparation of stage to 10-3 torr
/VAC6	Vacuum preparation of stage to 10-6 torr
/STEEL	All steel construction

Drive Screw (Required)

Option	Description
-20P	2 mm/rev precision-ground ball screw

Tabletop (Required)

Option	Description
-M	Tabletop with metric dimension mounting pattern and holes. Stage mounting base holes slotted for English and metric installation
-U	Tabletop with English dimension mounting pattern and holes. Stage mounting base holes slotted for English and metric installation

Motor (Required)

Option	Description
-NM	No motor or encoder
-SM	Stepping motor with connector and home marker pulse (50SMB2-HM/)
-BMS	Brushless servo motor with 2500-line encoder. (BMS60-A-D25-E2500H)
-BMS-BRK	Brushless servo motor with 2500-line encoder and motor-mounted brake (BMS60-A-D25-E2500H-BK1)
-BMS-AS	Brushless servo motor with 1000-line amplified sine encoder (BMS60-A-D25-E1000ASH)
-BMS-AS-BRK	Brushless servo motor with 1000-line amplified sine encoder and motor-mounted brake (BMS60-A-D25-E1000ASH-BK1)
-BM	Brushless servo motor with connectors and 2500-line encoder (BM75-D25-E2500H)
-BM-BRK	Brushless servo motor with connectors, 2500-line encoder, and motor-mounted brake (BM75-D25-E2500H-BK1)
-BM-AS	Brushless servo motor with connectors and 2500-line encoder (BM75-D25-E1000ASH)
-BM-AS-BRK	Brushless servo motor with connectors, 2500-line encoder, and motor-mounted brake (BM75-D25-E1000ASH-BK1)

Foldback Options (Optional)

Option	Description
-FB025	Foldback kit for 1/4" diameter shaft NEMA 23 motor
-FB025-BRK	Foldback kit with brake for 1/4" diameter shaft NEMA 23 motor

Motor Orientation (Required)

Option	Description
-0	No motor
-2	Bottom cable exit (optional orientation)
-3	Left side cable exit (standard orientation)
-4	Top cable exit (optional orientation)
-5	Right side cable exit (optional orientation)
-8	Right side fold-back (requires "FB" option, standard orientation)
-12	Left side fold-back (requires "FB" option, optional orientation)

Limits (Required)

Option	Description
-NC-9DU	Normally closed end of travel limit switches; 9-pin D connector
-NC-FLY	Normally closed end of travel limit switches; flying leads
-NO-9DU	Normally open end of travel limit switches; 9-pin D connector
-NO-FLY	Normally open end of travel limit switches; flying leads

Coupling (Required)

Option	Description
-C025	0.25 in coupling
-C0375	0.375 in coupling (required for BMS100 / BM130 motor)
-NONE	No motor coupling

Note: Coupling -NONE must be selected with all -FB options

Options

Option	Description
-MP100U	English base mounting plate
-MP100U/VAC	VAC6 prepared English base mounting plate
-MP100M	Metric base mounting plate
-MP100M/VAC	VAC6 prepared metric base mounting plate

Accessories (to be ordered as separate line item)

Option	Description
ALIGNMENT-NPA	Non-precision XY assembly
ALIGNMENT-NPAZ	Non-precision XZ or YZ assembly
ALIGNMENT-PA10	XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA10Z	XZ or YZ assembly with L-bracket; 10 arc second orthogonal
ALIGNMENT-PA5	XY assembly; 5 arc sec orthogonal
ALIGNMENT-PA5Z	XZ or YZ assembly with L-bracket; 5 arc second orthogonal
HDZ1	English right angle L-bracket (ATS100-050 thru ATS100-100)
HDZ1U/VAC6	VAC6 prepared English right angle L-bracket (ATS100-050 thru ATS100-100)
HDZ1M	Metric right angle L-bracket (ATS100-050 thru ATS100-100)
HDZ1M/VAC6	VAC6 prepared metric right angle L-bracket (ATS100-050 thru ATS100-100)
HDZ1L	English right angle L-bracket (ATS100-150 thru ATS100-200)
HDZ1L/VAC6	VAC6 prepared English right angle L-bracket (ATS100-150 thru ATS100-200)
HDZ1LM	Metric right angle L-bracket (ATS100-150 thru ATS100-200)
HDZ1LM/VAC6	VAC6 prepared metric right angle L-bracket (ATS100-150 thru ATS100-200)
HALAR	High-accuracy system linear error correction for accuracy and repeatability
HALSF	High-accuracy system improved straightness and flatness

*Please go HERE for complete information on XY, XZ and YZ assembly options.

*Please go HERE for complete information on motor orientation options.