ABL8000空气轴承直驱直线平台 | ABL8000 Air-Bearing Direct-Drive Linear Stage | 气浮直线电机平台
ABL8000空气轴承直线平台非常适合尖端制造业,特别是在半导体和数据存储行业,要求定位公差超越传统滚珠丝杠和机械轴承定位系统的能力。ABL8000空气轴承平台专为满足这些需求而设计,具有air-on-air空气对空气预紧,极高的刚性和优秀的几何特性。
ABL8000 Specifications
Model | ABL80020 | ABL80030 | ABL80040 | ABL80050 | ABL80075 | ABL80100 | ||
---|---|---|---|---|---|---|---|---|
Total Travel(1) | 200 mm | 300 mm | 400 mm | 500 mm | 750 mm | 1000 mm | ||
Accuracy(2) | LN Standard | ±5.0 μm | ±6.0 μm | ±7.0 μm | ||||
LT Standard | ±8.0 μm | ±11.5 μm | ±14.0 μm | ±15.75 μm | ±18.5 μm | ±20.0 μm | ||
HALAR(3) | ±0.5 μm | ±0.75 μm | ±1.0 μm | |||||
Bidirectional Repeatability(2) | ±0.2 μm | ±0.3 μm | ±0.4 μm | |||||
Straightness(2) | ±0.4 μm | ±0.75 μm | ±1.5 μm | ±2.0 μm | ±3.0 μm | ±4.0 μm | ||
Flatness(2) | ±0.4 μm | ±0.75 μm | ±1.5 μm | ±2.0 μm | ±3.0 μm | ±4.0 μm | ||
Feedback | Noncontact Linear Encoder (LN or LT) or Laser Interferometer | |||||||
Pitch | 2 arc sec | 3 arc sec | 4 arc sec | 5 arc sec | 7.5 arc sec | 10 arc sec | ||
Roll | 2 arc sec | 3 arc sec | 4 arc sec | 5 arc sec | 7.5 arc sec | 10 arc sec | ||
Yaw | 2 arc sec | 3 arc sec | 4 arc sec | 5 arc sec | 7.5 arc sec | 10 arc sec | ||
Maximum Speed(4) | LN | 1.2 m/s | ||||||
LT | 2 m/s | |||||||
Maximum Acceleration | 2 g (No Load) | |||||||
Maximum Force, Continuous(5,6) | -SC | 110.5 N (-P Motor Option) | ||||||
-LC | 197.2 N (-P Motor Option) | |||||||
Load Capacity(7) | -SC | Horizontal | 70 kg | |||||
Side | 30 kg | |||||||
-LC | Horizontal | 120 kg | ||||||
Side | 50 kg | |||||||
Operating Pressure(8) | 517-551 kPa | |||||||
Air Consumption(9) | -SC | 36 SLPM per Axis | ||||||
-LC | 58 SLPM per Axis | |||||||
Moving Mass | -SC | 10 kg | ||||||
-LC | 16 kg | |||||||
Stage Mass | -SC | 55 kg | 62 kg | 70.5 kg | 78.5 kg | 98 kg | 116.5 kg | |
-LC | 70 kg | 77 kg | 85.5 kg | 93.5 kg | 113 kg | 131.5 kg | ||
Material | Aluminum | |||||||
MTBF | 30,000 Hours |
- When mounting the ABL8000 in an XY configuration, the maximum upper axis length is 400 mm.
- Certified with each stage.
- Available with Aerotech controllers.
- Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
- Thermal limitations of positioning stage with respect to performance may limit continuous force output.
- Force may be limited by amplifier output.
- Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
- To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
- Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
- Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
Electrical Specifications
Drive System | -SC |
BLM-142-A |
-LC | BLM-264-A | |
Feedback | LN | Incremental Encoder; 4 μm Fundamental Period |
LT | Incremental Encoder; 20 μm Fundamental Period | |
Electronic Resolution | See signal period options on Order Information | |
Maximum Bus Voltage | 80 VDC | |
Limit Switches | 5 V, Normally Open | |
Home Switch | Near Center |
Recommended Controller
Multi-Axis | A3200 | Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR |
Ensemble | Ensemble MP/Ensemble CP/Ensemble HLe/Epaq | |
Single Axis | Soloist |
Soloist MP/Soloist CP/Soloist HLe |
- ABL8000-specs
- abl8000-specs2
Dimensions
- ABL8000-SC
- ABL8000-LC
Ordering Information
Ordering Example
ABL80 | 030 | -SC | -M | -S | -NC | -LN30AS | -SINGLE-CMS |
Ordering Options
Series | Travel | Carriage |
Mounting and Grid Pattern |
Motor |
Limits |
Encoder Resolution | Options |
---|---|---|---|---|---|---|---|
ABL80 |
020 030 040 050 075 100 |
-SC -LC |
-M -U |
-P -S |
-NC -NO |
-LNxxAS -LTxxAS |
-SINGLE-CMS -SINGLE-CUST.HOSE -SINLGE-CUST.CABLE -SINGLE-CUST.CABLE & HOSE -XY-CMS -XY-CUST.HOSE -XY-CUST.CABLE -XY-CUST.CABLE & HOSE |
ABL8000 Series Linear Air-Bearing Stage
Option | Description |
---|---|
ABL80020 | 200 mm (8 in) travel linear air-bearing stage with linear motor and limits |
ABL80030 | 300 mm (12 in) travel linear air-bearing stage with linear motor and limits |
ABL80040 | 400 mm (16 in) travel linear air-bearing stage with linear motor and limits |
ABL80050 | 500 mm (20 in) travel linear air-bearing stage with linear motor and limits |
ABL80075 | 750 mm (30 in) travel linear air-bearing stage with linear motor and limits |
ABL80100 | 1000 mm (40 in) travel linear air-bearing stage with linear motor and limits |
Carriage
Option | Description |
---|---|
-SC | 250 mm (10 in) length carriage (single-axis or y-axis use only) |
-LC | 400 mm (16 in) length carriage (required for x-axis in XY configuration) |
Note: When mounting the ABL8000 in an XY configuration, the maximum upper axis length is 400 mm.
Mounting and Grid Pattern
Option | Description |
---|---|
-M | Metric dimension mounting pattern and holes |
-U | English dimension mounting pattern and holes |
Motor
Option | Description |
---|---|
-P | MT-P magnet track |
-S | MT-S magnet track |
Limits
Option | Description |
---|---|
-NC | Normally-closed end of travel limit switches (standard) |
-NO | Normally-open end of travel limit switches |
Standard Linear Encoders
Option | Description |
---|---|
-LT20AS | Linear encoder for ABL80020; amplified sine output |
-LT30AS | Linear encoder for ABL80030; amplified sine output |
-LT40AS | Linear encoder for ABL80040; amplified sine output |
-LT50AS | Linear encoder for ABL80050; amplified sine output |
-LT75AS | Linear encoder for ABL80075; amplified sine output |
-LT100AS | Linear encoder for ABL80100; amplified sine output |
High-Accuracy Linear Encoders
Option | Description |
---|---|
-LN20AS | High-accuracy linear encoder for ABL80020; amplified sine output |
-LN30AS | High-accuracy linear encoder for ABL80030; amplified sine output |
-LN40AS | High-accuracy linear encoder for ABL80040; amplified sine output |
-LN50AS | High-accuracy linear encoder for ABL80050; amplified sine output |
-LN75AS | High-accuracy linear encoder for ABL80075; amplified sine output |
-LN100AS | High-accuracy linear encoder for ABL80100; amplified sine output |
Options
Option | Description |
---|---|
-SINGLE-CMS | Cable management system for single-axis applications |
-SINGLE-CUST.HOSE | Single CMS; 0.25 inch customer hose |
-SINGLE-CUST.CABLE | Single CMS; one customer cable |
-SINGLE-CUST.CABLE & HOSE | Single CMS; one customer cable and 0.25 inch hose |
-XY-CMS | Cable management system for X-Y assembly; order with each axis |
-XY-CUST.HOSE | XY CMS; customer hose |
-XY-CUST.CABLE | XY CMS; customer cable |
-XY-CUST.CABLE & HOSE | XY CMS; customer cable & hose |