ABL2000空气轴承直驱直线平台 | ABL2000 Air-Bearing Direct-Drive Linear Stage | 气浮直线电机平台
ABL2000空气轴承平台结合了优秀的俯仰/偏转特性和打印、成像、半导体和光子应用所必需的无与伦比的速度控制。
ABL2000 Specifications
Model | ABL20010 | ABL20020 | ABL20030 | ABL20040 | ||
---|---|---|---|---|---|---|
Travel | 100 mm | 200 mm | 300 mm | 400 mm | ||
Accuracy | LT | HALAR(1) | ±0.5 μm | ±0.75 μm | ||
Standard | ±4.0 μm | ±8.0 μm | ±11.5 μm | ±14.0 μm | ||
LN | HALAR(1) | ±0.5 μm | ±0.75 μm | |||
Standard | ±5.0 μm | |||||
Laser Interferometer | Standard ±10 ppm; Compensated ±1.5 ppm(2) | |||||
LZAS | ±0.2 μm over entire travel | N/A | N/A | |||
Repeatability | LT | ±0.2 μm | ±0.3 μm | |||
LN | ±0.2 μm | ±0.3 μm | ||||
LZAS | ±0.1 μm | N/A | N/A | |||
Straightness and Flatness | Maximum Deviation | ±0.25 μm | ±0.40 μm | ±0.75 μm | ±1.5 μm | |
Pitch/Roll/Yaw | 1 arc sec | 2 arc sec | 3 arc sec | 4 arc sec | ||
Maximum Speed(3) | 2 m/s | |||||
Maximum Acceleration | 2 g (No Load) | |||||
Maximum Load(4) | 50.0 kg | |||||
Operating Pressure(5) | 80 psi ±5 psi | |||||
Air Consumption(6) | 19.8 SLPM (0.7 SCFM) (Single Axis) | |||||
Moving Mass | 9 kg | |||||
Nominal Stage Mass | 30.0 kg | 34.5 kg | 39.5 kg | 44.0 kg | ||
Material | Aluminum | |||||
Finish | Hard Coating (62 Rockwell Hardness) |
- Available with Aerotech controllers.
- Requires environmental compensation.
- Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
- Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
- To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
- Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- When mounting the ABL2000 in an XY configuration the maximum upper axis length is 300 mm.
Model | ABL20050 | ABL20075 | ABL20100 | ABL20120 | ||
---|---|---|---|---|---|---|
Travel | 500 mm | 750 mm | 1000 mm |
1200 mm |
||
Accuracy | LT | HALAR(1) | ±0.75 μm | ±1 μm | ||
Standard | ±15.75 μm | ±18.5 μm | ±20.0 μm | ±21.0 μm | ||
LN | HALAR(1) | ±0.75 μm | ±1 μm | |||
Standard | ±5.0 μm | |||||
Laser Interferometer | Standard ±10 ppm; Compensated ±1.5 ppm(2) | |||||
Repeatability | LT | ±0.3 μm | ±0.4 μm | |||
LN | ±0.3 μm | ±0.4 μm | ||||
Straightness and Flatness | Maximum Deviation | ±2.0 μm | ±3.0 μm | ±4.0 μm | ±5.0 μm | |
Pitch/Roll/Yaw | 5 arc sec | 7.5 arc sec | 10 arc sec | 12 arc sec | ||
Maximum Speed(3) | 2 m/s | |||||
Maximum Acceleration | 2 g (No Load) | |||||
Maximum Load(4) | 50.0 kg | |||||
Operating Pressure(5) | 80 psi ±5 psi | |||||
Air Consumption(6) | 19.8 SLPM (0.7 SCFM) (Single Axis) | |||||
Moving Mass | 9 kg | |||||
Nominal Stage Mass | 49.0 kg | 61.0 kg | 72.5 kg | 79.5 kg | ||
Material | Aluminum | |||||
Finish | Hard Coating (62 Rockwell Hardness) |
- Available with Aerotech controllers.
- Requires environmental compensation.
- Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
- Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
- To protect air bearing against under-pressure an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
- Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- When mounting the ABL2000 in an XY configuration the maximum upper axis length is 300 mm.
- ABL2000
- ABL2000spec-2
Dimensions
- ABL2000
Ordering Information
Ordering Example
ABL20 | 100 | -10 | -RIBBON | -LN100AS | -NC | - |
Ordering Options
Series | Travel (mm) | Motor | Cabling | Linear Encoder | Limits | Options |
---|---|---|---|---|---|---|
ABL20 |
010 020 030 040 050 075 100 120 |
-10 |
-RIBBON -ROUND |
-LTnnAS -LTnnX5 -LNnnAS -LZASnn -LZR |
-NC |
-XY-CMS -HALAR |
ABL2000 Series Linear Air-Bearing Stage
Option | Description |
---|---|
ABL20010 | 100 mm (4 in) travel linear air-bearing stage with linear motor and limits |
ABL20020 | 200 mm (8 in) travel linear air-bearing stage with linear motor and limits |
ABL20030 | 300 mm (12 in) travel linear air-bearing stage with linear motor and limits |
ABL20040 | 400 mm (16 in) travel linear air-bearing stage with linear motor and limits |
ABL20050 | 500 mm (20 in) travel linear air-bearing stage with linear motor and limits |
ABL20075 | 750 mm (30 in) travel linear air-bearing stage with linear motor and limits |
ABL20100 | 1000 mm (40 in) travel linear air-bearing stage with linear motor and limits |
ABL20120 | 1200 mm (48 in) travel linear air-bearing stage with linear motor and limits |
Motor
Option | Description |
---|---|
-10 | Brushless linear motor (BLMC-192-A) |
Cabling
Option | Description |
---|---|
-RIBBON | Flat ribbon cabling |
-ROUND | E-chain and round wire cabling |
Standard Linear Encoders
Option | Description |
---|---|
-LT10AS | Linear encoder for ABL20010; amplified sine output |
-LT20AS | Linear encoder for ABL20020; amplified sine output |
-LT30AS | Linear encoder for ABL20030; amplified sine output |
-LT40AS | Linear encoder for ABL20040; amplified sine output |
-LT50AS | Linear encoder for ABL20050; amplified sine output |
-LT75AS | Linear encoder for ABL20075; amplified sine output |
-LT100AS | Linear encoder for ABL20100; amplified sine output |
-LT120AS | Linear encoder for ABL20120; amplified sine output |
-LT10X5 | Linear encoder for ABL20010; 1.0 micron line driver output |
-LT20X5 | Linear encoder for ABL20020; 1.0 micron line driver output |
-LT30X5 | Linear encoder for ABL20030; 1.0 micron line driver output |
-LT40X5 | Linear encoder for ABL20040; 1.0 micron line driver output |
-LT50X5 | Linear encoder for ABL20050; 1.0 micron line driver output |
-LT75X5 | Linear encoder for ABL20075; 1.0 micron line driver output |
-LT100X5 | Linear encoder for ABL20100; 1.0 micron line driver output |
-LT120X5 | Linear encoder for ABL20120; 1.0 micron line driver output |
High-Accuracy Linear Encoders
Option | Description |
---|---|
-LN10AS | High-accuracy linear encoder for ABL20010; amplified sine output |
-LN20AS | High-accuracy linear encoder for ABL20020; amplified sine output |
-LN30AS | High-accuracy linear encoder for ABL20030; amplified sine output |
-LN40AS | High-accuracy linear encoder for ABL20040; amplified sine output |
-LN50AS | High-accuracy linear encoder for ABL20050; amplified sine output |
-LN75AS | High-accuracy linear encoder for ABL20075; amplified sine output |
-LN100AS | High-accuracy linear encoder for ABL20100; amplified sine output |
-LN120AS | High-accuracy linear encoder for ABL20120; amplified sine output |
High-Accuracy/High-Resolution Linear Encoders
Option | Description |
---|---|
-LZAS10 | High-accuracy/high-resolution linear encoder for ABL20010; amplified sine output |
-LZAS20 | High-accuracy/high-resolution linear encoder for ABL20020; amplified sine output |
Note: Maximum travel for this option is 200 mm.
Laser Interferometer Feedback Option
Option | Description |
---|---|
-LZR | Laser interferometer feedback, amplified sine output |
Limits
Option | Description |
---|---|
-NC | Normally-closed end of travel limit switches (standard) |
-NO | Normally-open end of travel limit switches |
Options
Option | Description |
---|---|
-XY-CMS | Cable management system for X-Y assembly; order with X-axis only |