ABL1500空气轴承直驱直线平台 | ABL1500 Air-Bearing Direct-Drive Linear Stage | 气浮直线电机平台
ABL1500空气轴承直线平台非常适合尖端制造业，特别是在半导体和数据存储行业，要求定位公差超越传统滚珠丝杠和机械轴承定位系统的能力的场合。ABL1500空气轴承平台专为满足这些需求而设计，具有完全主动预紧力，极高的刚性和优秀的几何特性。
Mechanical Specifications
| Model | ABL15005 | ABL15010 | ABL15020 | ||
|---|---|---|---|---|---|
| Travel | 50 mm | 100 mm | 200 mm | ||
| Accuracy(1) | LN | HALAR | ±0.2 μm | ±0.2 μm | ±0.4 μm |
| Standard | ±1.0 μm | ±2.0 μm | ±5.0 μm | ||
| LT | HALAR | ±0.3 μm | ±0.3 μm | ±0.5 μm | |
| Standard | ±2.0 μm | ±4.0 μm | ±8.0 μm | ||
|
Repeatability (Bidirectional)(1) |
LN | ±0.05 μm | ±0.05 μm | ±0.1 μm | |
| LT | ±0.1 μm | ±0.2 μm | |||
| Straightness(1) | ±0.25 μm | ±0.4 μm | ±0.5 μm | ||
| Flatness(1) | ±0.25 μm | ±0.4 μm | ±0.5 μm | ||
| Pitch | ±0.5 arc sec | ±1 arc sec | ±2 arc sec | ||
| Roll | ±0.5 arc sec | ±1 arc sec | ±2 arc sec | ||
| Yaw | ±0.5 arc sec | ±1 arc sec | ±2 arc sec | ||
| Maximum Speed | 2 m/s | ||||
| Maximum Acceleration | 2 g (No Load) | ||||
| Maximum Force (Continuous) | 93.6 N | ||||
| Load Capacity(2) | Horizontal | 35 kg | |||
| Side | 25 kg | ||||
| Operating Pressure | 80 psi ±5 psig | ||||
| Air Consumption | 24-30 SLPM @ 551 kPa (0.85-1.06 SCFM @ 5.51 bar) | ||||
| Moving Mass (No Load) | 5.1 kg | ||||
| Stage Mass | 14.7 kg | 16.0 kg | 18.6 kg | ||
| Material | Aluminum | ||||
| MTBF (Mean Time Between Failure) | 30,000 Hours | ||||
- Certified with each stage.
- Axis orientation for on-axis loading is listed.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
- Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
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For XY configurations, the maximum upper axis travel is 200 mm. For upper axis travels greater than 200 mm but equal to or less than 500 mm, an ABL1500WB is required as the lower axis.
| Model | ABL15030 | ABL15040 | ABL15050 | ||
|---|---|---|---|---|---|
| Travel | 300 mm | 400 mm | 500 mm | ||
| Accuracy(1) | LN | HALAR | ±0.4 μm | ±0.5 μm | ±0.5 μm |
| Standard | ±5.0 μm | ±5.0 μm | ±5.0 μm | ||
| LT | HALAR | ±0.5 μm | ±0.6 μm | ±0.6 μm | |
| Standard | ±12.0 μm | ±16.0 μm | ±20.0 μm | ||
|
Repeatability (Bidirectional)(1) |
LN | ±0.15 μm | ±0.2 μm | ||
| LT | ±0.2 μm | ±0.3 μm | |||
| Straightness(1) | ±0.75 μm | ±1.5 μm | ±2.0 μm | ||
| Flatness(1) | ±0.75 μm | ±1.5 μm | ±2.0 μm | ||
| Pitch | ±3 arc sec | ±4 arc sec | ±5 arc sec | ||
| Roll | ±3 arc sec | ±4 arc sec | ±5 arc sec | ||
| Yaw | ±3 arc sec | ±4 arc sec | ±5 arc sec | ||
| Maximum Speed | 2 m/s | ||||
| Maximum Acceleration | 2 g (No Load) | ||||
| Maximum Force (Continuous) | 93.6 N | ||||
| Load Capacity(2) | Horizontal | 35 kg | |||
| Side | 25 kg | ||||
| Operating Pressure | 80 psi ±5 psig | ||||
| Air Consumption | 24-30 SLPM @ 551 kPa (0.85-1.06 SCFM @ 5.51 bar) | ||||
| Moving Mass (No Load) | 5.1 kg | ||||
| Stage Mass | 21.3 kg | 23.9 kg | 26.5 kg | ||
| Material | Aluminum | ||||
| MTBF (Mean Time Between Failure) | 30,000 Hours | ||||
- Certified with each stage.
- Axis orientation for on-axis loading is listed.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
- Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
- For XY configurations, the maximum upper axis travel is 200 mm. For upper axis travels greater than 200 mm but equal to or less than 500 mm, an ABL1500WB is required as the lower axis.
Electrical Specifications
| Drive System | Brushless Linear Servomotor |
| Feedback | Noncontact Linear Encoder (see signal period options on Order Information page) |
| Maximum Bus Voltage | up to 80 VDC |
| Limit Switches | 5 V, Normally Closed |
| Home Switch | Near Center |
Recommended Controller
| Multi-Axis | A3200 | Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR |
| Ensemble | Ensemble MP/Ensemble CP/Ensemble HLe/Epaq | |
| Single Axis | Soloist |
Soloist MP/Soloist CP/Soloist HLe |
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ABL1500Spec
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ABL1500Spec-2
Dimensions
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ABL1500
Ordering Information
Ordering Example
| ABL15 | 010 | -M | -10 | -NC | -LN10AS | -SINGLE-CMS |
Ordering Options
| Series | Travel | Mounting and Grid Pattern | Motor | Limits | Linear Encoder | Options |
|---|---|---|---|---|---|---|
| ABL15 |
005 010 020 030 040 050 |
-M | -10 | -NC |
-LTnnAS -LTnnX50 -LNnnAS |
-SINGLE-CMS -XY-CMS |
ABL1500 Series Linear Air-Bearing Stage
| Option | Description |
|---|---|
| ABL15005 | 50 mm (2 in) travel linear air-bearing stage with linear motor and limits |
| ABL15010 | 100 mm (4 in) travel linear air-bearing stage with linear motor and limits |
| ABL15020 | 200 mm (8 in) travel linear air-bearing stage with linear motor and limits |
| ABL15030 | 300 mm (12 in) travel linear air-bearing stage with linear motor and limits |
| ABL15040 | 400 mm (16 in) travel linear air-bearing stage with linear motor and limits |
| ABL15050 | 500 mm (20 in) travel linear air-bearing stage with linear motor and limits |
Mounting and Grid Pattern
| Option | Description |
|---|---|
| -M | Metric dimension mounting pattern and holes |
Motor
| Option | Description |
|---|---|
| -10 | Brushless linear motor (BLMC-192-A) |
Limits
| Option | Description |
|---|---|
| -NC | Normally-closed end of travel limit switches (standard) |
Standard Linear Encoders
| Option | Description |
|---|---|
| -LT05AS | Linear encoder for ABL15005; amplified sine output |
| -LT10AS | Linear encoder for ABL15010; amplified sine output |
| -LT20AS | Linear encoder for ABL15020; amplified sine output |
| -LT30AS | Linear encoder for ABL15030; amplified sine output |
| -LT40AS | Linear encoder for ABL15040; amplified sine output |
| -LT50AS | Linear encoder for ABL15050; amplified sine output |
| -LT05X50 | Linear encoder for ABL15005; 0.1 micron line driver output |
| -LT10X50 | Linear encoder for ABL15010; 0.1 micron line driver output |
| -LT20X50 | Linear encoder for ABL15020; 0.1 micron line driver output |
| -LT30X50 | Linear encoder for ABL15030; 0.1 micron line driver output |
| -LT40X50 | Linear encoder for ABL15040; 0.1 micron line driver output |
| -LT50X50 | Linear encoder for ABL15050; 0.1 micron line driver output |
High-Accuracy Linear Encoders
| Option | Description |
|---|---|
| -LN05AS | High-accuracy linear encoder for ABL15005; amplified sine output |
| -LN10AS | High-accuracy linear encoder for ABL15010; amplified sine output |
| -LN20AS | High-accuracy linear encoder for ABL15020; amplified sine output |
| -LN30AS | High-accuracy linear encoder for ABL15030; amplified sine output |
| -LN40AS | High-accuracy linear encoder for ABL15040; amplified sine output |
| -LN50AS | High-accuracy linear encoder for ABL15050; amplified sine output |
Options
| Option | Description |
|---|---|
| -SINGLE-CMS | Cable management system for single-axis applications |
| -XY-CMS | Cable management system for X-Y assembly |
Accessories (to be ordered as separate line item)
| Option | Description |
|---|---|
| HALAR | High-accuracy system linear error correction for accuracy and repeatability |
| ALIGNMENT-NPA | Non-precision XY assembly |
| ALIGNMENT-PA10 | XY assembly; 10 arc sec orthogonal |
| ALIGNMENT-PA5 | XY assembly; 5 arc sec orthogonal |