AirLift115 空气轴承升降平台 | 垂直运动平台 | AirLift115 Air-Bearing Lift Stage
Aerotech AirLift 115 series stages offer the ideal solution for applications that require very stringent Z direction positioning while maintaining extremely tight angular performance over full travel. Applications include semiconductor wafer inspection and testing, noncontact metrology, optical inspection systems and laser processing applications.