ALIO has quickly become a world leader with nano-precision vacuum stage and robotic systems. All ALIO products with exception of the air bearing systems are UHV compatible. Linear, rotary, open center X-Y, Hexapods, Tripods and goniometer stages and systems are available in HV (e-7 TORR) or UHV ( e-10 TORR) with ultra low outgassing material and components all carefully prepared and baked.

Nanometer management of motion is becoming more pervasive in industry as leading edge technology pursues a common trend of working on smaller and smaller scales.  This trend is prevalent in numerous positioning sensitive industries, such as fiber optics, bio medical, micro machines, electronics, semiconductor, energy, optics, aerospace, Synchrotrons as well as other research and development.

Nano-positioning applications have demanding requirements that are further complicated when the management of motion is under vacuum or when requiring extended travel, finer repeatability, higher speed, greater uptime and of course, lower cost.

The challenges of engineering and selecting components that must work together in perfect harmony to achieve nanometer precision are not to be under estimated. The drive mechanism, bearings, feedback system, motion controller, kinematic structure and the environment all need to be designed to perfection to meet nanometer precision in atmospheric or vacuum environments. The vacuum challenges vary from 10e-3 TORR to 10e-12 TORR from positioning performance to outgassing challenges.

             Open Center X-Y UHV System

           HV Vacuum Hexapod

                  AI-HR2-UV Hexapod

                  Vacuum rotary stage