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ARA1000空气轴承精密直驱转台 | ARA1000 Air-Bearing Direct-Drive Rotary Stage | ARA1000精密气浮转台
Aerotech 的 ARA1000 旋转执行器代表了显著的突破性应用,如平板显示器处理加工所要求的大型有效载荷的联接方式。高负载惯量多轴系统可能遭受机械不稳定,限制整机生产效率。ARA1000 通过特殊设计,显著提高了平台刚性,消除了这个问题。ARA1000转台采用了标准的57.2毫米通孔,它可以很容易地穿过真空线路。台面包括一个标准的安装模式,其允许非常容易地进行卡盘安装。

ARA1000 Series Specifications

Model ARA1000
Travel 100°
Bus Voltage Up to 160 VDC
Motor S-180-44-A
Continuous Current Apk 2.7 A
Arms 1.9 A
Accuracy(1) ±9.7 μrad (±2 arc sec)
Bidirectional Repeatability ±4.85 μrad (±1 arc sec)
Resolution(2) 0.058 μrad (0.012 arc sec)
Maximum Load (Axial) 45 kg
Maximum Speed(3) 60° per second
Rotating Inertia (Unloaded) 0.1203 kg-m2
Operating Pressure(4) 60 psig (4.137 bar) +0 psig (0 bar) -5 psig (-0.344 bar)
Vacuum Supply 21 "Hg ±2 "Hg
Air Consumption(5) <56.6 SLPM (<2 SCFM)
Mass 17 kg
Finish Tabletop Hardcoat
Stage Black Anodize
  1. Requires Aerotech controller for calibration and parts program implementation.
  2. Based on Aerotech controls using 500X multiplication and controller quadrature. Higher resolutions available.
  3. Maximum speed is load dependent. Maximum application velocity may be limited by system data rate and resolution.
  4. To protect an air bearing against under pressure, an in-line pressure switch tied to the motion controller is recommended.
  5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 μm or better; recommend nitrogen at 99.9% purity.
  6. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Dimensions

  • ARA1000

Ordering Information

Ordering Example

ARA1000 -NC -REAS

Ordering Options

Series Limits Encoder
ARA1000 -NC
-NO
-REAS

ARA1000 Rotary Actuator

Option Description
ARA1000 Direct-drive rotary stage

Limits

Option Description
-NC Normally-closed end of travel limit switches (standard)
-NO Normally-open end of travel limit switches

Encoder

Option Description
-REAS Rotary encoder 150 lines/degree; fundamental AS output