AirLift115 空气轴承升降平台 | 垂直运动平台 | AirLift115 Air-Bearing Lift Stage
Aerotech AirLift 115 series stages offer the ideal solution for applications that require very stringent Z direction positioning while maintaining extremely tight angular performance over full travel. Applications include semiconductor wafer inspection and testing, noncontact metrology, optical inspection systems and laser processing applications.
Mechanical Specifications
| Model | AirLift 115-050 | AirLift 115-100 | AirLift 115-150 | |
|---|---|---|---|---|
| Travel | 50 mm | 100 mm | 150 mm | |
| Accuracy(1) | Standard | ±2.0 μm | ±4.0 μm | ±6.0 μm |
| HALAR | ±1.0 μm | ±1.25 μm | ±1.5 μm | |
| Resolution | 0.05 μm | |||
| Bidirectional Repeatability(1) | ±0.5 μm | |||
| Straightness(2) | ±0.25 μm | ±0.35 μm | ±0.45 μm | |
| Pitch(2) | ±1 arc sec | ±1.25 arc sec | ±2 arc sec | |
| Roll(2) | ±1 arc sec | ±1.25 arc sec | ±2 arc sec | |
| Yaw(2) | ±1 arc sec | ±1.25 arc sec | ±2 arc sec | |
| Maximum Speed | 5 mm/rev | 50 mm/s | ||
| Maximum Acceleration | 0.25 g | |||
| Load Capacity(3) | Vertical | 15 kg | ||
| Operating Pressure | 80 psi | |||
| Air Consumption | ≤40 SLPM | |||
| Material | Aluminum | |||
| MTBF (Mean Time Between Failure) | 15,000 Hours | |||
- Certified with each stage.
- Specifications are for centered load. Other loading configurations will affect specifications.
- Axis orientation for on-axis loading is listed.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- To protect air bearing against under-pressure condition, an in-line pressure switch tied to the motion controller is required.
- Air supply must be clean, dry to 0°F dewpoint, and filtered to 0.25 μm or better.
Electrical Specifications
| Drive System | Brushless Rotary Servomotor |
| Feedback | Noncontact Linear Encoder |
| Maximum Bus Voltage | Up to 160 VDC |
| Limit Switches | 5 V, Normally Closed |
Recommended Controller
| Multi-Axis | A3200 | Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR |
| Ensemble | Ensemble MP/Ensemble CP/Ensemble HLe/Epaq | |
| Single Axis | Soloist | Soloist MP/Soloist CP/Soloist HLe |
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
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AirLift115Spec
Dimensions
-
MT1
-
MT2
Ordering Information
Ordering Example
| AirLift 115 | -050 | -LTX100 | -BMS60-BRK | -MT1 |
Ordering Options
| Series | Travel Options | Encoder | Motor | Mounting |
|---|---|---|---|---|
| AirLift 115 |
-100 -150 |
-LTX100 |
-BMS60-BRK -BMS100-BRK |
-MT1 -MT2-050 -MT2-100 -MT2-150 |
AirLift 115 Air-Bearing Lift Stage
| Option | Description |
|---|---|
| AirLift 115 | Screw-driven, air-bearing vertical stage |
Travel Options
| Option | Description |
|---|---|
| -050 | 50 mm travel |
| -100 | 100 mm travel |
| -150 | 150 mm travel |
Encoder
| Option | Description |
|---|---|
| -LTX100 | Linear encoder for AirLift 115; 0.05 micron line-driver output |
Motor
| Option | Description |
|---|---|
| -BMS60-BRK | Brushless servomotor with connectors and brake |
| -BMS100-BRK | Brushless servomotor with connectors and brake |
Mounting
| Option | Description |
|---|---|
| -MT1 | Mounting configuration 1; mounting surface perpendicular to axis motion |
| -MT2-050 | Mounting configuration 2; mounting surface parallel to axis motion; for 50 mm travel stage |
| -MT2-100 | Mounting configuration 2; mounting surface parallel to axis motion; for 100 mm travel stage |
| -MT2-150 | Mounting configuration 2; mounting surface parallel to axis motion; for 150 mm travel stage |