WaferMax Z 直驱升降平台 | 机械轴承直线电机直驱垂直升降平台 | 高精度垂直校准平台 | WaferMax Z Mechanical-Bearing Direct-Drive Lift Stage
The WaferMax Z represents a significant breakthrough in vertical alignment of high-precision components in one compact package. Its superior noncontact linear motor drive employs a high-accuracy encoder for direct position feedback. When combined with Aerotech’s MXH multiplier, it offers 0.83 nm resolution in addition to high speed and accuracy.
WaferMax Z Specifications
| Model | WaferMax Z | |
|---|---|---|
| Travel | 5 mm | |
| Motor Type | Direct-drive brushless linear servomotor | |
| Bus Voltage | up to 160 VDC | |
| Continuous Current | Apk | 2.9 A |
| Arms | 2.1 A | |
| Encoder | 20 μm fundamental; amplified sine output | |
| Resolution | 0.83 nm | |
| Accuracy(1,3) | ±1.5 μm | |
| Bidirectional Repeatability(3) | ±0.3 μm | |
| Straightness(4) | ±2 μm | |
| Roll | 20 arc sec | |
| Pitch | 20 arc sec | |
| Yaw | 20 arc sec | |
| Maximum Speed | 4 mm/s | |
| Maximum Load(5) | 10 kg (requires use of integral pneumatic counterbalance) | |
| Moving Mass | 1.0 kg | |
| Wedge Ratio | 12:1 | |
| Stage Mass | 4.2 kg | |
| Material | Aluminum | |
| Finish | Black anodize hard cover; Hard coat (62 Rockwell Hardness) tabletop | |
- Requires Aerotech controller.
- For inverted operation, consult factory.
- Certified with each stage.
- Measured perpendicular or parallel to wedge direction.
- Higher maximum loads possible. Contact factory for details.
- Specifications are per axis measured 25 mm above the tabletop without a payload. Performance is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.
Dimensions
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WaferMax Z
Ordering Information
Ordering Example
| WaferMax Z | -NC | -LTAS |
Ordering Options
| Series | Limit Switches | Encoder |
|---|---|---|
| WaferMax Z |
-NC -NO |
-LTAS |
WaferMax Z
| Option | Description |
|---|---|
| WaferMax Z | Direct-drive vertical stage |
Limits
| Option | Description |
|---|---|
| -NC | Normally closed end of travel limit switches (STANDARD) |
| -NO | Normally open end of travel limit switches |
Encoder
| Option | Description |
|---|---|
| -LTAS | Linear encoder; amplified sine output |